DH

Dongho Heo

Lam Research: 7 patents #410 of 2,128Top 20%
Overall (All Time): #742,361 of 4,157,543Top 20%
7
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
8864931 Mask trimming Supriya Goyal, Jisoo Kim, S. M. Reza Sadjadi 2014-10-21
8277670 Plasma process with photoresist mask pretreatment Ji Soo Kim 2012-10-02
8172948 De-fluoridation process Jisoo Kim, S. M. Reza Sadjadi 2012-05-08
7910489 Infinitely selective photoresist mask etch Ji Soo Kim, Peter Cirigliano, Sangheon Lee, Daehan Choi, S. M. Reza Sadjadi 2011-03-22
7838426 Mask trimming Supriya Goyal, Jisoo Kim, S.M. Reza Sadjadi 2010-11-23
7785484 Mask trimming with ARL etch Supriya Goyal, Jisoo Kim, S. M. Reza Sadjadi 2010-08-31
7309646 De-fluoridation process Jisoo Kim, S. M. Reza Sadjadi 2007-12-18