Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9263331 | Method for forming self-aligned contacts/vias with high corner selectivity | Peng Wang, Eric A. Hudson | 2016-02-16 |
| 9224618 | Method to increase mask selectivity in ultra-high aspect ratio etches | Rajinder Dhindsa | 2015-12-29 |
| 9105700 | Method for forming self-aligned contacts/vias with high corner selectivity | Peng Wang, Eric A. Hudson | 2015-08-11 |
| 8906810 | Pulsed dielectric etch process for in-situ metal hard mask shape control to enable void-free metallization | Bhaskar Nagabhirava, Alan J. Jensen, Tom Choi | 2014-12-09 |
| 8668835 | Method of etching self-aligned vias and trenches in a multi-layer film stack | Bhaskar Nagabhirava | 2014-03-11 |