| 6475293 |
Rotating belt wafer edge cleaning apparatus |
Monsour Moinpour, Ilan Berman |
2002-11-05 |
| 6357071 |
Rotating belt wafer edge cleaning apparatus |
Monsour Moinpour, Ilan Berman |
2002-03-19 |
| 6334229 |
Apparatus for cleaning edges of contaminated substrates |
Mansour Moinpour, Hoang T. Nguyen, Mohsen Salek, Tom Bramblett, John deLarios +3 more |
2002-01-01 |
| 6092253 |
Flexible-leaf substrate edge cleaning apparatus |
Monsour Moinpour, Ilan Berman |
2000-07-25 |
| 5901399 |
Flexible-leaf substrate edge cleaning apparatus |
Monsour Moinpour, Ilan Berman |
1999-05-11 |
| 5868857 |
Rotating belt wafer edge cleaning apparatus |
Monsour Moinpour, Ilan Berman |
1999-02-09 |
| 5861066 |
Method and apparatus for cleaning edges of contaminated substrates |
Mansour Moinpour, Hoang T. Nguyen, Mohsen Salek, Tom Bramblett, John deLarios +3 more |
1999-01-19 |
| 5725414 |
Apparatus for cleaning the side-edge and top-edge of a semiconductor wafer |
Monsour Moinpour, Ilan Berman |
1998-03-10 |
