Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6475293 | Rotating belt wafer edge cleaning apparatus | Monsour Moinpour, Young C. Park | 2002-11-05 |
| 6357071 | Rotating belt wafer edge cleaning apparatus | Monsour Moinpour, Young C. Park | 2002-03-19 |
| 6092253 | Flexible-leaf substrate edge cleaning apparatus | Monsour Moinpour, Young C. Park | 2000-07-25 |
| 5901399 | Flexible-leaf substrate edge cleaning apparatus | Monsour Moinpour, Young C. Park | 1999-05-11 |
| 5868857 | Rotating belt wafer edge cleaning apparatus | Monsour Moinpour, Young C. Park | 1999-02-09 |
| 5725414 | Apparatus for cleaning the side-edge and top-edge of a semiconductor wafer | Monsour Moinpour, Young C. Park | 1998-03-10 |