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Home › Rotating belt wafer edge cleaning apparatus

Rotating belt wafer edge cleaning apparatus

US Patent 5868857 · Granted Feb 9, 1999

Estimated economic value: $168,808,000 ⓘ

Assignee

Intel

Inventors

Monsour Moinpour (6 patents)
Ilan Berman (6 patents)
Young C. Park (8 patents)

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