Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method and apparatus for cleaning edges of contaminated substrates

Method and apparatus for cleaning edges of contaminated substrates

US Patent 5861066 · Granted Jan 19, 1999

Estimated economic value: $152,384,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method of forming low-resistivity Ru ALD through a bi-layer process and related 2025
Augmented reality quick-start and user guide2025
Methods of forming low resistivity titanium nitride thin film in horizontal vias2024
Augmented reality quick-start and user guide2023
Optical redirection adapter2022
Augmented reality quick-start and user guide2022
Method and device for simulating a virtual out-of-box experience of a packaged p2022
Augmented reality quick-start and user guide2020
Optical redirection adapter2020
Multi-station tool with wafer transfer microclimate systems2019
Augmented reality quick-start and user guide2019
Augmented reality asset locator2019