Flexible polishing fluid delivery system

Assignee

• Applied Materials

Inventors

• Lidia Vereen (1 patents)
• Peter Skarpelos (1 patents)
• Brian Downum (1 patents)
• Patrick A. Williams (5 patents)
• Terry Kin Ting Ko (9 patents)
• Christopher Heung-Gyun Lee (10 patents)
• Kenneth R. Reynolds (15 patents)
• John Hearne (10 patents)
• Daniel Hachnochi (2 patents)

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