| 8500916 |
Method for aligning wafers within wafer processing equipment |
Jian-Huei Feng, Hung-Chin Guthrie, Quang Le |
2013-08-06 |
| 7108588 |
System, method, and apparatus for wetting slurry delivery tubes in a chemical mechanical polishing process to prevent clogging thereof |
Hung-Chin Guthrie |
2006-09-19 |
| 6371836 |
Groove cleaning device for chemical-mechanical polishing |
Brian J. Brown, Robert D. Tolles, Doyle E. Bennett, Madhavi R. Chandrachood |
2002-04-16 |
| 6152806 |
Concentric platens |
— |
2000-11-28 |
| 6135868 |
Groove cleaning device for chemical-mechanical polishing |
Brian J. Brown, Robert D. Tolles, Doyle E. Bennett, Madhavi R. Chandrachood |
2000-10-24 |
| 5989103 |
Magnetic carrier head for chemical mechanical polishing |
Manoocher Birang, John Prince |
1999-11-23 |
| 5938507 |
Linear conditioner apparatus for a chemical mechanical polishing system |
Sen-Hou Ko, Richard V. Rafloski, John Prince, Alfred A. Goldspiel, Stephen J. Blumenkranz +1 more |
1999-08-17 |
| 5899801 |
Method and apparatus for removing a substrate from a polishing pad in a chemical mechanical polishing system |
Robert D. Tolles, Jeffrey Marks, William R. Bartlett, Victor Belitsky |
1999-05-04 |