Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8500916 | Method for aligning wafers within wafer processing equipment | Jian-Huei Feng, Hung-Chin Guthrie, Quang Le | 2013-08-06 |
| 7108588 | System, method, and apparatus for wetting slurry delivery tubes in a chemical mechanical polishing process to prevent clogging thereof | Hung-Chin Guthrie | 2006-09-19 |
| 6371836 | Groove cleaning device for chemical-mechanical polishing | Brian J. Brown, Robert D. Tolles, Doyle E. Bennett, Madhavi R. Chandrachood | 2002-04-16 |
| 6152806 | Concentric platens | — | 2000-11-28 |
| 6135868 | Groove cleaning device for chemical-mechanical polishing | Brian J. Brown, Robert D. Tolles, Doyle E. Bennett, Madhavi R. Chandrachood | 2000-10-24 |
| 5989103 | Magnetic carrier head for chemical mechanical polishing | Manoocher Birang, John Prince | 1999-11-23 |
| 5938507 | Linear conditioner apparatus for a chemical mechanical polishing system | Sen-Hou Ko, Richard V. Rafloski, John Prince, Alfred A. Goldspiel, Stephen J. Blumenkranz +1 more | 1999-08-17 |
| 5899801 | Method and apparatus for removing a substrate from a polishing pad in a chemical mechanical polishing system | Robert D. Tolles, Jeffrey Marks, William R. Bartlett, Victor Belitsky | 1999-05-04 |