| 6602116 |
Substrate retaining ring |
— |
2003-08-05 |
| 6443823 |
Carrier head with layer of conformable material for a chemical mechanical polishing system |
Robert D. Tolles, Tsungan Cheng |
2002-09-03 |
| 6390904 |
Retainers and non-abrasive liners used in chemical mechanical polishing |
Allan Gleason, Manoocher Birang, Mohsen Salek, Syed H. Askari |
2002-05-21 |
| 6388002 |
Dispersed resins for use in coating compositions |
Gary Baker |
2002-05-14 |
| 6159087 |
End effector for pad conditioning |
Manoocher Birang |
2000-12-12 |
| 6116992 |
Substrate retaining ring |
— |
2000-09-12 |
| 6036587 |
Carrier head with layer of conformable material for a chemical mechanical polishing system |
Robert D. Tolles, Tsungan Cheng |
2000-03-14 |
| 5989103 |
Magnetic carrier head for chemical mechanical polishing |
Manoocher Birang, James Nystrom |
1999-11-23 |
| 5938507 |
Linear conditioner apparatus for a chemical mechanical polishing system |
Sen-Hou Ko, Richard V. Rafloski, James Nystrom, Alfred A. Goldspiel, Stephen J. Blumenkranz +1 more |
1999-08-17 |
| 5743784 |
Apparatus and method to determine the coefficient of friction of a chemical mechanical polishing pad during a pad conditioning process and to use it to control the process |
Manoocher Birang |
1998-04-28 |
| 5679813 |
Metal organic compounds and their use |
Philip Tate, John Michael Hilton |
1997-10-21 |
| 5607991 |
Metal organic compounds and their use |
Philip Tate, John Michael Hilton |
1997-03-04 |
| 5409527 |
Water-based water repellents |
Gary Baker |
1995-04-25 |
| 5276172 |
Metal organic compounds |
Philip Tate, John Michael Hilton |
1994-01-04 |
| 4765164 |
Spare tire bracket lock |
— |
1988-08-23 |
