Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6602116 | Substrate retaining ring | — | 2003-08-05 |
| 6443823 | Carrier head with layer of conformable material for a chemical mechanical polishing system | Robert D. Tolles, Tsungan Cheng | 2002-09-03 |
| 6390904 | Retainers and non-abrasive liners used in chemical mechanical polishing | Allan Gleason, Manoocher Birang, Mohsen Salek, Syed H. Askari | 2002-05-21 |
| 6388002 | Dispersed resins for use in coating compositions | Gary Baker | 2002-05-14 |
| 6159087 | End effector for pad conditioning | Manoocher Birang | 2000-12-12 |
| 6116992 | Substrate retaining ring | — | 2000-09-12 |
| 6036587 | Carrier head with layer of conformable material for a chemical mechanical polishing system | Robert D. Tolles, Tsungan Cheng | 2000-03-14 |
| 5989103 | Magnetic carrier head for chemical mechanical polishing | Manoocher Birang, James Nystrom | 1999-11-23 |
| 5938507 | Linear conditioner apparatus for a chemical mechanical polishing system | Sen-Hou Ko, Richard V. Rafloski, James Nystrom, Alfred A. Goldspiel, Stephen J. Blumenkranz +1 more | 1999-08-17 |
| 5743784 | Apparatus and method to determine the coefficient of friction of a chemical mechanical polishing pad during a pad conditioning process and to use it to control the process | Manoocher Birang | 1998-04-28 |
| 5679813 | Metal organic compounds and their use | Philip Tate, John Michael Hilton | 1997-10-21 |
| 5607991 | Metal organic compounds and their use | Philip Tate, John Michael Hilton | 1997-03-04 |
| 5409527 | Water-based water repellents | Gary Baker | 1995-04-25 |
| 5276172 | Metal organic compounds | Philip Tate, John Michael Hilton | 1994-01-04 |
| 4765164 | Spare tire bracket lock | — | 1988-08-23 |