Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6443823 | Carrier head with layer of conformable material for a chemical mechanical polishing system | Robert D. Tolles, John Prince | 2002-09-03 |
| 6036587 | Carrier head with layer of conformable material for a chemical mechanical polishing system | Robert D. Tolles, John Prince | 2000-03-14 |