| 8795029 |
Apparatus and method for in-situ endpoint detection for semiconductor processing operations |
Manoocher Birang, Nils Johansson |
2014-08-05 |
| 8506356 |
Apparatus and method for in-situ endpoint detection for chemical mechanical polishing operations |
Manoocher Birang, Nils Johansson |
2013-08-13 |
| 7775852 |
Apparatus and method for in-situ endpoint detection for chemical mechanical polishing operations |
Manoocher Birang, Nils Johansson |
2010-08-17 |
| 7255629 |
Polishing assembly with a window |
Manoocher Birang, William L. Guthrie |
2007-08-14 |
| 7118450 |
Polishing pad with window and method of fabricating a window in a polishing pad |
Manoocher Birang, William L. Guthrie |
2006-10-10 |
| 7011565 |
Forming a transparent window in a polishing pad for a chemical mechanical polishing apparatus |
Manoocher Birang, William L. Guthrie |
2006-03-14 |
| 6910944 |
Method of forming a transparent window in a polishing pad |
Manoocher Birang, William L. Guthrie |
2005-06-28 |
| 6876454 |
Apparatus and method for in-situ endpoint detection for chemical mechanical polishing operations |
Manoocher Birang, Nils Johansson |
2005-04-05 |
| 6875078 |
Apparatus and method for in-situ endpoint detection for chemical mechanical polishing operations |
Manoocher Birang |
2005-04-05 |
| 6860791 |
Polishing pad for in-situ endpoint detection |
Manoocher Birang |
2005-03-01 |
| 6719818 |
Apparatus and method for in-situ endpoint detection for chemical mechanical polishing operations |
Manoocher Birang, Nils Johansson |
2004-04-13 |
| 6676717 |
Apparatus and method for in-situ endpoint detection for chemical mechanical polishing operations |
Manoocher Birang |
2004-01-13 |
| 6537133 |
Method for in-situ endpoint detection for chemical mechanical polishing operations |
Manoocher Birang, Nils Johansson |
2003-03-25 |
| 6390904 |
Retainers and non-abrasive liners used in chemical mechanical polishing |
Manoocher Birang, John Prince, Mohsen Salek, Syed H. Askari |
2002-05-21 |
| 6280290 |
Method of forming a transparent window in a polishing pad |
Manoocher Birang, William L. Guthrie |
2001-08-28 |
| 6045439 |
Forming a transparent window in a polishing pad for a chemical mechanical polishing apparatus |
Manoocher Birang, William L. Guthrie |
2000-04-04 |
| 5893796 |
Forming a transparent window in a polishing pad for a chemical mechanical polishing apparatus |
Manoocher Birang, William L. Guthrie |
1999-04-13 |
