Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8795029 | Apparatus and method for in-situ endpoint detection for semiconductor processing operations | Manoocher Birang, Nils Johansson | 2014-08-05 |
| 8506356 | Apparatus and method for in-situ endpoint detection for chemical mechanical polishing operations | Manoocher Birang, Nils Johansson | 2013-08-13 |
| 7775852 | Apparatus and method for in-situ endpoint detection for chemical mechanical polishing operations | Manoocher Birang, Nils Johansson | 2010-08-17 |
| 7255629 | Polishing assembly with a window | Manoocher Birang, William L. Guthrie | 2007-08-14 |
| 7118450 | Polishing pad with window and method of fabricating a window in a polishing pad | Manoocher Birang, William L. Guthrie | 2006-10-10 |
| 7011565 | Forming a transparent window in a polishing pad for a chemical mechanical polishing apparatus | Manoocher Birang, William L. Guthrie | 2006-03-14 |
| 6910944 | Method of forming a transparent window in a polishing pad | Manoocher Birang, William L. Guthrie | 2005-06-28 |
| 6876454 | Apparatus and method for in-situ endpoint detection for chemical mechanical polishing operations | Manoocher Birang, Nils Johansson | 2005-04-05 |
| 6875078 | Apparatus and method for in-situ endpoint detection for chemical mechanical polishing operations | Manoocher Birang | 2005-04-05 |
| 6860791 | Polishing pad for in-situ endpoint detection | Manoocher Birang | 2005-03-01 |
| 6719818 | Apparatus and method for in-situ endpoint detection for chemical mechanical polishing operations | Manoocher Birang, Nils Johansson | 2004-04-13 |
| 6676717 | Apparatus and method for in-situ endpoint detection for chemical mechanical polishing operations | Manoocher Birang | 2004-01-13 |
| 6537133 | Method for in-situ endpoint detection for chemical mechanical polishing operations | Manoocher Birang, Nils Johansson | 2003-03-25 |
| 6390904 | Retainers and non-abrasive liners used in chemical mechanical polishing | Manoocher Birang, John Prince, Mohsen Salek, Syed H. Askari | 2002-05-21 |
| 6280290 | Method of forming a transparent window in a polishing pad | Manoocher Birang, William L. Guthrie | 2001-08-28 |
| 6045439 | Forming a transparent window in a polishing pad for a chemical mechanical polishing apparatus | Manoocher Birang, William L. Guthrie | 2000-04-04 |
| 5893796 | Forming a transparent window in a polishing pad for a chemical mechanical polishing apparatus | Manoocher Birang, William L. Guthrie | 1999-04-13 |