Issued Patents All Time
Showing 25 most recent of 31 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8795029 | Apparatus and method for in-situ endpoint detection for semiconductor processing operations | Manoocher Birang, Allan Gleason | 2014-08-05 |
| 8758086 | Friction sensor for polishing system | Gabriel L. Miller, Manoocher Birang, Boguslaw A. Swedek, Dominic J. Benvegnu | 2014-06-24 |
| 8506356 | Apparatus and method for in-situ endpoint detection for chemical mechanical polishing operations | Manoocher Birang, Allan Gleason | 2013-08-13 |
| 8342906 | Friction sensor for polishing system | Gabriel L. Miller, Manoocher Birang, Boguslaw A. Swedek, Dominic J. Benvegnu | 2013-01-01 |
| 7775852 | Apparatus and method for in-situ endpoint detection for chemical mechanical polishing operations | Manoocher Birang, Allan Gleason | 2010-08-17 |
| 7682221 | Integrated endpoint detection system with optical and eddy current monitoring | Boguslaw A. Swedek, Manoocher Birang | 2010-03-23 |
| 7513818 | Polishing endpoint detection system and method using friction sensor | Gabriel L. Miller, Manoocher Birang, Boguslaw A. Swedek, Dominic J. Benvegnu | 2009-04-07 |
| 7500901 | Data processing for monitoring chemical mechanical polishing | Boguslaw A. Swedek, Manoocher Birang | 2009-03-10 |
| 7229340 | Monitoring a metal layer during chemical mechanical polishing | Hiroji Hanawa, Boguslaw A. Swedek, Manoocher Birang | 2007-06-12 |
| 7195536 | Integrated endpoint detection system with optical and eddy current monitoring | Boguslaw A. Swedek, Manoocher Birang | 2007-03-27 |
| 7101254 | System and method for in-line metal profile measurement | Boguslaw A. Swedek, Andreas Norbert Wiswesser, Manoocher Birang | 2006-09-05 |
| 7097537 | Determination of position of sensor measurements during polishing | Jeffrey Drue David, Manoocher Birang, Boguslaw A. Swedek, Ingemar Carlsson | 2006-08-29 |
| 7008296 | Data processing for monitoring chemical mechanical polishing | Boguslaw A. Swedek, Manoocher Birang | 2006-03-07 |
| 7008297 | Combined eddy current sensing and optical monitoring for chemical mechanical polishing | Boguslaw A. Swedek, Manoocher Birang | 2006-03-07 |
| 7001246 | Method and apparatus for monitoring a metal layer during chemical mechanical polishing | Hiroji Hanawa, Boguslaw A. Swedek, Manoocher Birang | 2006-02-21 |
| 6975107 | Eddy current sensing of metal removal for chemical mechanical polishing | Hiroji Hanawa, Boguslaw A. Swedek, Manoocher Birang | 2005-12-13 |
| 6966816 | Integrated endpoint detection system with optical and eddy current monitoring | Boguslaw A. Swedek, Manoocher Birang | 2005-11-22 |
| 6945845 | Chemical mechanical polishing apparatus with non-conductive elements | Doyle E. Bennett, Sandeep Rammohan Koppikar, Jeffrey Drue David, Boguslaw A. Swedek | 2005-09-20 |
| 6930478 | Method for monitoring a metal layer during chemical mechanical polishing using a phase difference signal | Hiroji Hanawa, Boguslaw A. Swedek, Manoocher Birang | 2005-08-16 |
| 6924641 | Method and apparatus for monitoring a metal layer during chemical mechanical polishing | Hiroji Hanawa, Boguslaw A. Swedek, Manoocher Birang | 2005-08-02 |
| 6878036 | Apparatus for monitoring a metal layer during chemical mechanical polishing using a phase difference signal | Hiroji Hanawa, Bogusla W Swedek, Manoocher Birang | 2005-04-12 |
| 6878038 | Combined eddy current sensing and optical monitoring for chemical mechanical polishing | Boguslaw A. Swedek, Manoocher Birang | 2005-04-12 |
| 6876454 | Apparatus and method for in-situ endpoint detection for chemical mechanical polishing operations | Manoocher Birang, Allan Gleason | 2005-04-05 |
| 6831742 | Monitoring substrate processing using reflected radiation | Zhifeng Sui, Hongqing Shan, Hamid Noorbakhsh, Yu Guan | 2004-12-14 |
| 6811466 | System and method for in-line metal profile measurement | Boguslaw A. Swedek, Andreas Norbert Wiswesser, Manoocher Birang | 2004-11-02 |