Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12343840 | Control of processing parameters for substrate polishing with substrate precession | Eric Lau, Charles C. Garretson, Huanbo Zhang, Benjamin Cherian, Brian J. Brown +1 more | 2025-07-01 |
| 11931853 | Control of processing parameters for substrate polishing with angularly distributed zones using cost function | Eric Lau, Charles C. Garretson, Huanbo Zhang, Benjamin Cherian, Brian J. Brown +1 more | 2024-03-19 |
| 11869815 | Asymmetry correction via oriented wafer loading | Eric Lau, Charles C. Garretson, Huanbo Zhang | 2024-01-09 |
| 11282755 | Asymmetry correction via oriented wafer loading | Eric Lau, Charles C. Garretson, Huanbo Zhang | 2022-03-22 |
| 8814631 | Tracking spectrum features in two dimensions for endpoint detection | Jeffrey Drue David, Xiaoyuan Hu, Harry Q. Lee | 2014-08-26 |
| 8679979 | Using optical metrology for within wafer feed forward process control | Jeffrey Drue David, Harry Q. Lee, Boguslaw A. Swedek, Dominic J. Benvegnu, Wen-Chiang Tu | 2014-03-25 |
| 8579675 | Methods of using optical metrology for feed back and feed forward process control | Jeffrey Drue David, Harry Q. Lee, Boguslaw A. Swedek, Dominic J. Benvegnu, Wen-Chiang Tu | 2013-11-12 |
| 8292693 | Using optical metrology for wafer to wafer feed back process control | Jeffrey Drue David, Harry Q. Lee, Boguslaw A. Swedek, Dominic J. Benvegnu, Wen-Chiang Tu | 2012-10-23 |
| 8039397 | Using optical metrology for within wafer feed forward process control | Jeffrey Drue David, Harry Q. Lee, Boguslaw A. Swedek, Dominic J. Benvegnu, Wen-Chiang Tu | 2011-10-18 |
| 7514353 | Contact metallization scheme using a barrier layer over a silicide layer | Timothy Weidman, Kapila Wijekoon, Avgerinos V. Gelatos, Amit Khandelwal, Arulkumar Shanmugasundram +3 more | 2009-04-07 |