Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11725285 | Preventing deposition on pedestal in semiconductor substrate processing | Vinayakaraddy Gulabal, Ravi Vellanki, Gary Lind, Manjunath SATYADEVAN | 2023-08-15 |
| 10895539 | In-situ chamber clean end point detection systems and methods using computer vision systems | Kapil Sawlani, Gary Lind, Michal Danek, Ronald Powell, Kaihan Ashtiani | 2021-01-19 |
| 10832936 | Substrate support with increasing areal density and corresponding method of fabricating | Peter J. Woytowitz, Vincent E. Burkhart, Karl Leeser | 2020-11-10 |
| 9938616 | Physical vapor deposition of low-stress nitrogen-doped tungsten films | Michael Ng | 2018-04-10 |
| 7037830 | PVD deposition process for enhanced properties of metal films | Jack Griswold, Tom Dorsh, Michael Ng, David E. Reedy, Paul D. Healey +2 more | 2006-05-02 |