Issued Patents All Time
Showing 1–22 of 22 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12227842 | Vapor accumulator for corrosive gases with purging | Panya Wongsenakhum, Joshua Collins, Harald te Nijenhuis | 2025-02-18 |
| 12215420 | Pedestal thermal profile tuning using multiple heated zones and thermal voids | Alok Mahadeva | 2025-02-04 |
| D1057675 | Pedestal for a substrate processing system | Andrew Paul Eib | 2025-01-14 |
| 12162117 | Pedestal polishing apparatus | Robert McKinney, Sushanth Kondi, Mahendra Byrapura Manjunath, Vinayakaraddy Gulabal, Andrew Paul Eib +2 more | 2024-12-10 |
| 11725285 | Preventing deposition on pedestal in semiconductor substrate processing | Vinayakaraddy Gulabal, Ravi Vellanki, Michael Rumer, Manjunath SATYADEVAN | 2023-08-15 |
| 10895539 | In-situ chamber clean end point detection systems and methods using computer vision systems | Kapil Sawlani, Michal Danek, Ronald Powell, Michael Rumer, Kaihan Ashtiani | 2021-01-19 |
| 10603698 | Airborne component extractor hood | Brian J. Hammers, Adam Joseph Frank, William Maske, Bradley G. Carman, Daniel P. McDonald +1 more | 2020-03-31 |
| 10460977 | Lift pin holder with spring retention for substrate processing systems | Andrew H. Breninger | 2019-10-29 |
| 10132413 | Gas inlet valve with incompatible materials isolation | Panya Wongsenakhum | 2018-11-20 |
| 9964332 | Systems and methods for bulk vaporization of precursor | — | 2018-05-08 |
| 9951421 | Inlet for effective mixing and purging | — | 2018-04-24 |
| 9677265 | Curtain wall panel bracket leveling system | Larry Moeller, Stanislaw Piotrowski, James C. Fournier, Frank Otte | 2017-06-13 |
| 9468958 | Airborne component extractor with adjustable flow rates | Brian J. Hammers, Adam Joseph Frank, William Maske, Bradley G. Carman, Daniel P. McDonald | 2016-10-18 |
| 9410315 | Curtain wall panel bracket leveling system | Larry Moeller, Stanislaw Piotrowski, James C. Fournier, Frank Otte | 2016-08-09 |
| 9088085 | High temperature electrode connections | — | 2015-07-21 |
| 9068347 | Curtain wall panel bracket leveling system | Larry Moeller, Stanislaw Piotrowski, James C. Fournier, Frank Otte | 2015-06-30 |
| 8753447 | Heat shield for heater in semiconductor processing apparatus | John Floyd Ostrowski | 2014-06-17 |
| 7737035 | Dual seal deposition process chamber and process | Colin F. Smith, William Johanson, Thomas M. Pratt, John Mazzocco | 2010-06-15 |
| 7686927 | Methods and apparatus for controlled-angle wafer positioning | Jonathan D. Reid, Steven T. Mayer, Seshasayee Varadarajan, David Craig Smith, Evan E. Patton +2 more | 2010-03-30 |
| 7097410 | Methods and apparatus for controlled-angle wafer positioning | Jonathan D. Reid, Steven T. Mayer, Seshasayee Varadarajan, David Craig Smith, Evan E. Patton +2 more | 2006-08-29 |
| 6883733 | Tapered post, showerhead design to improve mixing on dual plenum showerheads | — | 2005-04-26 |
| 6551487 | Methods and apparatus for controlled-angle wafer immersion | Jonathan D. Reid, Steven T. Mayer, Seshasayee Varadarajan, David Craig Smith, Evan E. Patton +1 more | 2003-04-22 |