| 10964514 |
Electrode for plasma processing chamber |
John Daugherty |
2021-03-30 |
$460,773,000 |
| 8883640 |
Sequential station tool for wet processing of semiconductor wafers |
Theodore Cacouris, Eliot K. Broadbent, Steven T. Mayer |
2014-11-11 |
|
| 8450210 |
Sequential station tool for wet processing of semiconductor wafers |
Theodore Cacouris, Eliot K. Broadbent, Steven T. Mayer |
2013-05-28 |
|
| D672010 |
Adjustable chemical vapor deposition showerhead assembly |
Percival Verdeflor, Alan Popiolkowski |
2012-12-04 |
|
| 8048280 |
Process for electroplating metals into microscopic recessed features |
Steven T. Mayer, Vijay Bhaskaran, Robert Jackson, Jonathan D. Reid |
2011-11-01 |
$9,147,000 |
| 8026174 |
Sequential station tool for wet processing of semiconductor wafers |
Theodore Cacouris, Eliot K. Broadbent, Steven T. Mayer |
2011-09-27 |
$14,203,000 |
| 7696538 |
Sensor for measuring liquid contaminants in a semiconductor wafer fabrication process |
Won Lee |
2010-04-13 |
$5,874,000 |
| 7686927 |
Methods and apparatus for controlled-angle wafer positioning |
Jonathan D. Reid, Steven T. Mayer, Seshasayee Varadarajan, David Craig Smith, Dinesh S. Kalakkad +2 more |
2010-03-30 |
$8,078,000 |
| 7189647 |
Sequential station tool for wet processing of semiconductor wafers |
Theodore Cacouris, Eliot K. Broadbent, Steven T. Mayer |
2007-03-13 |
$9,734,000 |
| 7097410 |
Methods and apparatus for controlled-angle wafer positioning |
Jonathan D. Reid, Steven T. Mayer, Seshasayee Varadarajan, David Craig Smith, Dinesh S. Kalakkad +2 more |
2006-08-29 |
$12,349,000 |
| 7084466 |
Liquid detection end effector sensor and method of using the same |
Won Lee |
2006-08-01 |
$11,109,000 |
| 7033465 |
Clamshell apparatus with crystal shielding and in-situ rinse-dry |
Jonathan D. Reid, Jeffrey A. Hawkins, Dinesh S. Kalakkad |
2006-04-25 |
$22,872,000 |
| 6964792 |
Methods and apparatus for controlling electrolyte flow for uniform plating |
Steven T. Mayer, R. Marshall Stowell, Seshasayee Varadarajan |
2005-11-15 |
$21,685,000 |
| 6946065 |
Process for electroplating metal into microscopic recessed features |
Steven T. Mayer, Vijay Bhaskaran, Robert Jackson, Jonathan D. Reid |
2005-09-20 |
$24,223,000 |
| 6890416 |
Copper electroplating method and apparatus |
Steven T. Mayer, Robert Jackson, Jonathan D. Reid |
2005-05-10 |
$25,539,000 |
| 6800187 |
Clamshell apparatus for electrochemically treating wafers |
Jonathan D. Reid, Steven T. Mayer, R. Marshall Stowell, Jeff Hawkins |
2004-10-05 |
$10,886,000 |
| 6773571 |
Method and apparatus for uniform electroplating of thin metal seeded wafers using multiple segmented virtual anode sources |
Steven T. Mayer, Brian Paul Blackman, Jonathan D. Reid, Thomas A. Ponnuswamy, Harold D. Perry |
2004-08-10 |
$14,429,000 |
| 6755946 |
Clamshell apparatus with dynamic uniformity control |
Jonathan D. Reid, Jeffrey A. Hawkins, Dinesh S. Kalakkad, Steven T. Mayer |
2004-06-29 |
$12,780,000 |
| 6716334 |
Electroplating process chamber and method with pre-wetting and rinsing capability |
Jonathan D. Reid, Steven W. Taatjes, Robert J. Contolini |
2004-04-06 |
$16,112,000 |
| 6589401 |
Apparatus for electroplating copper onto semiconductor wafer |
Wayne Fetters |
2003-07-08 |
$23,704,000 |
| 6551487 |
Methods and apparatus for controlled-angle wafer immersion |
Jonathan D. Reid, Steven T. Mayer, Seshasayee Varadarajan, David Craig Smith, Dinesh S. Kalakkad +1 more |
2003-04-22 |
$18,308,000 |
| 6527920 |
Copper electroplating apparatus |
Steven T. Mayer, Robert Jackson, Jonathan D. Reid |
2003-03-04 |
$26,613,000 |
| 6471845 |
Method of controlling chemical bath composition in a manufacturing environment |
John O. Dukovic, William E. Corbin, Jr., Erick G. Walton, Peter S. Locke, Panayotis Andricacos +2 more |
2002-10-29 |
|
| 6436249 |
Clamshell apparatus for electrochemically treating semiconductor wafers |
Wayne Fetters |
2002-08-20 |
$29,950,000 |
| 6402923 |
Method and apparatus for uniform electroplating of integrated circuits using a variable field shaping element |
Steven T. Mayer, Richard Hill, Alain Harrus, Robert J. Contolini, Steve Taatjes +1 more |
2002-06-11 |
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