Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8883640 | Sequential station tool for wet processing of semiconductor wafers | Evan E. Patton, Eliot K. Broadbent, Steven T. Mayer | 2014-11-11 |
| 8450210 | Sequential station tool for wet processing of semiconductor wafers | Evan E. Patton, Eliot K. Broadbent, Steven T. Mayer | 2013-05-28 |
| 8026174 | Sequential station tool for wet processing of semiconductor wafers | Evan E. Patton, Eliot K. Broadbent, Steven T. Mayer | 2011-09-27 |
| 7189647 | Sequential station tool for wet processing of semiconductor wafers | Evan E. Patton, Eliot K. Broadbent, Steven T. Mayer | 2007-03-13 |