| 11934103 |
Apparatus for post exposure bake of photoresist |
Douglas A. Buchberger, Jr., Dmitry Lubomirsky, Srinivas D. Nemani |
2024-03-19 |
| 11815816 |
Apparatus for post exposure bake of photoresist |
Douglas A. Buchberger, Jr., Dmitry Lubomirsky, Srinivas D. Nemani |
2023-11-14 |
| 11798606 |
Additive patterning of semiconductor film stacks |
Srinivas D. Nemani, Ellie Yieh, Praburam Gopalraja, Steven Hiloong WELCH, Bhargav S. Citla |
2023-10-24 |
| 11049537 |
Additive patterning of semiconductor film stacks |
Srinivas D. Nemani, Ellie Yieh, Praburam Gopalraja, Steven Hiloong WELCH, Bhargav S. Citla |
2021-06-29 |
| 11018223 |
Methods for forming device isolation for semiconductor applications |
Shiyu Sun, Nam Sung Kim |
2021-05-25 |
| 7820472 |
Method of forming front contacts to a silicon solar cell without patterning |
Peter G. Borden, Li Xu |
2010-10-26 |
| 7736928 |
Precision printing electroplating through plating mask on a solar cell substrate |
Sergey Lopatin, David Eaglesham, Nicolay Kovarsky, Robert Z. Bachrach, John D. Busch +1 more |
2010-06-15 |
| 7704352 |
High-aspect ratio anode and apparatus for high-speed electroplating on a solar cell substrate |
Sergey Lopatin, Nicolay Kovarsky, David Eaglesham, Charles Gay |
2010-04-27 |
| 7504335 |
Grafted seed layer for electrochemical plating |
Michael Yang, Aron Rosenfeld, Hooman Hafezi, Zhi-Wen Sun |
2009-03-17 |
| 7214297 |
Substrate support element for an electrochemical plating cell |
You Wang, Anzhong Chang |
2007-05-08 |
| 6946716 |
Electroplated interconnection structures on integrated circuit chips |
Panayotis Andricacos, Harikilia Deligianni, Daniel C. Edelstein, Wilma Jean Horkans, Chao-Kun Hu +4 more |
2005-09-20 |
| 6709562 |
Method of making electroplated interconnection structures on integrated circuit chips |
Panayotis Andricacos, Hariklia Deligianni, Daniel C. Edelstein, Wilma Jean Horkans, Chao-Kun Hu +4 more |
2004-03-23 |
| 6685814 |
Method for enhancing the uniformity of electrodeposition or electroetching |
Cyprian Emeka Uzoh, Hariklia Deligianni |
2004-02-03 |
| 6569299 |
Membrane partition system for plating of wafers |
Jonathan D. Reid, Robert J. Contolini |
2003-05-27 |
| 6471845 |
Method of controlling chemical bath composition in a manufacturing environment |
William E. Corbin, Jr., Erick G. Walton, Peter S. Locke, Panayotis Andricacos, James E. Fluegel +2 more |
2002-10-29 |
| 6261426 |
Method and apparatus for enhancing the uniformity of electrodeposition or electroetching |
Cyprian Emeka Uzoh, Hariklia Deligianni |
2001-07-17 |
| 6251251 |
Anode design for semiconductor deposition |
Cyprian Emeka Uzoh, Panayotis Andricacos, Robert P. Westerfield, Jr. |
2001-06-26 |
| 6193859 |
Electric potential shaping apparatus for holding a semiconductor wafer during electroplating |
Robert J. Contolini, Jonathan D. Reid, Evan E. Patton, Jingbin Feng, Steve Taatjes |
2001-02-27 |
| 6159354 |
Electric potential shaping method for electroplating |
Robert J. Contolini, Jonathan D. Reid, Evan E. Patton, Jingbin Feng, Steve Taatjes |
2000-12-12 |
| 6126798 |
Electroplating anode including membrane partition system and method of preventing passivation of same |
Jonathan D. Reid, Robert J. Contolini |
2000-10-03 |
| 5522975 |
Electroplating workpiece fixture |
Panayotis Andricacos, Kirk G. Berridge, Helmut R. Poweleit, Jeffrey S. Richter, Lubomyr T. Romankiw +1 more |
1996-06-04 |
| 5516412 |
Vertical paddle plating cell |
Panayotis Andricacos, Kirk G. Berridge, Matteo Flotta, Jose Ordonez, Helmut R. Poweleit +5 more |
1996-05-14 |
| 5352350 |
Method for controlling chemical species concentration |
Panayotis Andricacos, Lubomyr T. Romankiw |
1994-10-04 |
| 5312532 |
Multi-compartment eletroplating system |
Panayotis Andricacos, Moritz Branger, Robert M. Browne, Benjamin W. B. Fu, Robert Hitzfeld +4 more |
1994-05-17 |
