Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7901490 | Reducing introduction of foreign material to wafers | David J. Clark, Alison K. Easton, James H. Peterman | 2011-03-08 |
| 7678258 | Void-free damascene copper deposition process and means of monitoring thereof | Panayotis Andricacos, Dean S. Chung, Hariklia Deligianni, Keith Kwietniak, Peter S. Locke +4 more | 2010-03-16 |
| 7407605 | Manufacturable CoWP metal cap process for copper interconnects | Darryl D. Restaino, Donald F. Canaperi, Judith M. Rubino, Sean Smith, Richard O. Henry +1 more | 2008-08-05 |
| 7253106 | Manufacturable CoWP metal cap process for copper interconnects | Darryl D. Restaino, Donald F. Canaperi, Judith M. Rubino, Sean Smith, Richard O. Henry +1 more | 2007-08-07 |
| 7227265 | Electroplated copper interconnection structure, process for making and electroplating bath | Panayotis Andricacos, Steven H. Boettcher, Dean S. Chung, Hariklia Deligianni, Wilma Jean Horkans +6 more | 2007-06-05 |
| 6627052 | Electroplating apparatus with vertical electrical contact | Peter S. Locke, Yuet-Ying Yu | 2003-09-30 |
| 6471845 | Method of controlling chemical bath composition in a manufacturing environment | John O. Dukovic, William E. Corbin, Jr., Erick G. Walton, Peter S. Locke, Panayotis Andricacos +2 more | 2002-10-29 |
| 6395164 | Copper seed layer repair technique using electroless touch-up | Panayotis Andricacos, John G. Gaudiello, Ronald D. Goldblatt, Sandra G. Malhotra, Milan Paunovic | 2002-05-28 |
| 6270646 | Electroplating apparatus and method using a compressible contact | Erick G. Walton, Dean S. Chung, Lara Sandra Collins, William E. Corbin, Jr., Hariklia Deligianni +4 more | 2001-08-07 |
| 6241868 | Method for electroplating a film onto a substrate | Glen N. Biggs, Donald M. Brewer, Suryanarayana Kaja, Ashwani K. Malhotra, Phillip W. Palmatier | 2001-06-05 |
| 6077405 | Method and apparatus for making electrical contact to a substrate during electroplating | Glen N. Biggs, Donald M. Brewer, Suryanarayana Kaja, Ashwani K. Malhotra, Phillip W. Palmatier | 2000-06-20 |