Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10903067 | Cooled reflective adapter plate for a deposition chamber | Ashish Goel, Anantha K. Subramani | 2021-01-26 |
| 10504719 | Cooled reflective adapter plate for a deposition chamber | Ashish Goel, Anantha K. Subramani | 2019-12-10 |
| 9863038 | Off-angled heating of the underside of a substrate using a lamp assembly | Anantha K. Subramani, Umesh M. Kelkar, Chandrasekhar Balasubramanyam, Joseph M. Ranish | 2018-01-09 |
| 9818587 | Off-angled heating of the underside of a substrate using a lamp assembly | Anantha K. Subramani, Umesh M. Kelkar, Chandrasekhar Balasubramanyam, Joseph M. Ranish | 2017-11-14 |
| 8992741 | Method for ultra-uniform sputter deposition using simultaneous RF and DC power on target | Rongjun Wang, Xianmin Tang, Zhendong Liu, Tza-Jing Gung | 2015-03-31 |
| 8685215 | Mechanism for continuously varying radial position of a magnetron | Keith A. Miller, Anantha K. Subramani, Tza-Jing Gung, Hong Yang, Vincent E. Burkhart | 2014-04-01 |
| 8404048 | Off-angled heating of the underside of a substrate using a lamp assembly | Anantha K. Subramani, Umesh M. Kelkar, Chandrasekhar Balasubramanyam, Joseph M. Ranish | 2013-03-26 |
| 7736473 | Magnetron having continuously variable radial position | Keith A. Miller, Anantha K. Subramani, Tza-Jing Gung, Hong Yang, Vincent E. Burkhart | 2010-06-15 |
| 7018515 | Selectable dual position magnetron | Tza-Jing Gung, Hong Yang, Anantha K. Subramani, Keith A. Miller, Vincent E. Burkhart | 2006-03-28 |