Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Off-angled heating of the underside of a substrate using a lamp assembly

Off-angled heating of the underside of a substrate using a lamp assembly

US Patent 8404048 · Granted Mar 26, 2013

Estimated economic value: $10,775,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Plasma chamber with gas cross-flow, microwave resonators and a rotatable pedesta2025
Eco-efficiency (sustainability) dashboard for semiconductor manufacturing2025
Apparatus and method for controlling a flow process material to a deposition cha2025
Cooling flow in substrate processing according to predicted cooling parameters2025
Photoresist deposition using independent multichannel showerhead2025
Eco-efficiency monitoring and exploration platform for semiconductor manufacturi2025
Pulse train annealing method and apparatus2025
Showerhead assembly with heated showerhead2024
Multi zone spot heating in EPI2024
Symmetric plasma source to generate pie-shaped treatment2024
Single process volume to perform high-pressure and low-pressure processes with f2024
Eco-efficiency (sustainability) dashboard for semiconductor manufacturing2024