Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Single process volume to perform high-pressure and low-pressure processes with features to reduce cross-contamination

Single process volume to perform high-pressure and low-pressure processes with features to reduce cross-contamination

US Patent 12012652 · Granted Jun 18, 2024

Estimated economic value: $83,264,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Plasma chamber with gas cross-flow, microwave resonators and a rotatable pedesta2025
Plasma chamber with gas cross-flow, microwave resonators and a rotatable pedesta2025
System and method for validating critical paths of integrated circuits2025
Directional selective junction clean with field polymer protections2025
Capacitive sensors and capacitive sensing locations for plasma chamber condition2025
Low temperature selective etching of silicon nitride using microwave plasma2025
Smart camera substrate2025
Techniques and device structures based upon directional dielectric deposition an2025
Method for improving ultra-violet light transmittance of ethylene glycol2025
Microelectronics package comprising a package-on-package (PoP) architecture with2025
Reaction cell for species sensing2025
Reaction cell for species sensing2025