Eco-efficiency monitoring and exploration platform for semiconductor manufacturing

Assignee

• Applied Materials

Inventors

• Ala Moradian (41 patents)
• Umesh M. Kelkar (27 patents)
• Elizabeth Neville (8 patents)
• Orlando Trejo (7 patents)
• Sergey Meirovich (3 patents)
• Kartik Shah (68 patents)
• Shreyas Kher (22 patents)

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