Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12217985 | Wafer placement correction in indexed multi-station processing chambers | Dong Niu | 2025-02-04 |
| 11835868 | Protective coating for electrostatic chucks | Vincent E. Burkhart | 2023-12-05 |
| 11086233 | Protective coating for electrostatic chucks | Vincent E. Burkhart | 2021-08-10 |
| 8829444 | Synthesis of advanced scintillators via vapor deposition techniques | Vinod K. Sarin | 2014-09-09 |
| 8530845 | Synthesis of advanced scintillators via vapor deposition techniques | Vinod K. Sarin | 2013-09-10 |