Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6377060 | Method and apparatus for wafer detection | Vincent E. Burkhart | 2002-04-23 |
| 6075375 | Apparatus for wafer detection | Vincent E. Burkhart | 2000-06-13 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6377060 | Method and apparatus for wafer detection | Vincent E. Burkhart | 2002-04-23 |
| 6075375 | Apparatus for wafer detection | Vincent E. Burkhart | 2000-06-13 |