Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12385138 | Plasma-enhanced deposition of film stacks | Jason Dirk Haverkamp, Pramod Subramonium, Dong Niu, Keith Fox, John B. Alexy +5 more | 2025-08-12 |
| 11746420 | PECVD apparatus for in-situ deposition of film stacks | Pramod Subramonium, Dong Niu, Keith Fox | 2023-09-05 |
| 10475627 | Carrier ring wall for reduction of back-diffusion of reactive species and suppression of local parasitic plasma ignition | Chengzhu Qi, Yukinori Sakiyama, Bin Luo, Douglas Keil, Pramod Subramonium +1 more | 2019-11-12 |
| 10214816 | PECVD apparatus for in-situ deposition of film stacks | Jason Dirk Haverkamp, Pramod Subramonium, Dong Niu, Keith Fox, John B. Alexy +5 more | 2019-02-26 |
| 9165788 | Post-deposition soft annealing | Keith Fox, Bart J. van Schravendijk, Dong Niu, Lucas Benjamin HENDERSON | 2015-10-20 |
| 8895415 | Tensile stressed doped amorphous silicon | Keith Fox, Dong Niu | 2014-11-25 |
| 6524991 | Process for the direct oxidation of olefins to olefin oxides | Robert G. Bowman, Howard W. Clark, Joseph J. Maj, George E. Hartwell | 2003-02-25 |
| 6309998 | Process for the direct oxidation of olefins to olefin oxides | Robert G. Bowman, Howard W. Clark, Joseph J. Maj, George E. Hartwell | 2001-10-30 |
| 6031116 | Process for the direct oxidation of olefins to olefin oxides | Robert G. Bowman, Howard W. Clark, Joseph J. Maj, George E. Hartwell | 2000-02-29 |