Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12385138 | Plasma-enhanced deposition of film stacks | Pramod Subramonium, Joseph L. Womack, Dong Niu, Keith Fox, John B. Alexy +5 more | 2025-08-12 |
| 10214816 | PECVD apparatus for in-situ deposition of film stacks | Pramod Subramonium, Joseph L. Womack, Dong Niu, Keith Fox, John B. Alexy +5 more | 2019-02-26 |
| 9873946 | Multi-station sequential curing of dielectric films | Dennis M. Hausmann, Kevin McLaughlin, Krishnan Shrinivasan, Michael Rivkin, Eugene Smargiassi +1 more | 2018-01-23 |
| 9028924 | In-situ deposition of film stacks | Pramod Subramonium, Joe Womack, Dong Niu, Keith Fox, John B. Alexy +5 more | 2015-05-12 |
| 8980769 | Multi-station sequential curing of dielectric films | Dennis M. Hausmann, Kevin McLaughlin, Krishnan Shrinivasan, Michael Rivkin, Eugene Smargiassi +1 more | 2015-03-17 |
| 8741394 | In-situ deposition of film stacks | Pramod Subramonium, Joe Womack, Dong Niu, Keith Fox, John B. Alexy +5 more | 2014-06-03 |