Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 5427820 | Thermal control line for delivering liquid to a point of use in a photolithography system | Vuong P. Nguyen | 1995-06-27 | $2,773,000 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 5427820 | Thermal control line for delivering liquid to a point of use in a photolithography system | Vuong P. Nguyen | 1995-06-27 | $2,773,000 |