Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7106493 | MEMS-based valve device | — | 2006-09-12 |
| 6436610 | Method for selectively exposing a light pattern to a photosensitive work surface | — | 2002-08-20 |
| 6248509 | Maskless photoresist exposure system using mems devices | — | 2001-06-19 |
| 5456627 | Conditioner for a polishing pad and method therefor | Paul David Jackson, Stephen C. Schultz, Glen Ong, Richard B. Rice, Parag S. Modi +1 more | 1995-10-10 |