Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7198545 | Method of calibration and data evaluation for eddy current metrology systems | Nikolay Korovin | 2007-04-03 |
| 7189140 | Methods using eddy current for calibrating a CMP tool | Nikolay Korovin, John Kevin Shugrue | 2007-03-13 |
| 6953382 | Methods and apparatuses for conditioning polishing surfaces utilized during CMP processing | Nikolay Korovin | 2005-10-11 |