Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6492282 | Integrated circuits and manufacturing methods | Dirk Tobben, Peter Weigand | 2002-12-10 |
| 6492688 | Dual work function CMOS device | — | 2002-12-10 |
| 6376348 | Reliable polycide gate stack with reduced sheet resistance and thickness | Martin Schrems | 2002-04-23 |
| 6319787 | Method for forming a high surface area trench capacitor | Gerhard Enders, Dietrich Widmann | 2001-11-20 |
| 6262448 | Memory cell having trench capacitor and vertical, dual-gated transistor | Gerhard Enders, Lothar Risch, Dietrich Widmann | 2001-07-17 |
| 6197666 | Method for the fabrication of a doped silicon layer | Herbert Schafer, Martin Franosch, Reinhard Stengl, Hans Reisinger | 2001-03-06 |
| 6190955 | Fabrication of trench capacitors using disposable hard mask | Richard L. Kleinhenz, Soichi Nadahara, Ronald W. Nunes, Klaus Penner, Klaus Roithner +2 more | 2001-02-20 |
| 6130145 | Insitu doped metal policide | Johnathan E. Faltermeier, Radhika Srinivasan | 2000-10-10 |
| 6096654 | Gapfill of semiconductor structure using doped silicate glasses | Markus Kirchhoff | 2000-08-01 |
| 6057250 | Low temperature reflow dielectric-fluorinated BPSG | Markus Kirchhoff, Ashima B. Chakravarti, Kevin A. McKinley, Son V. Nguyen, Michael J. Shapiro | 2000-05-02 |
| 6048475 | Gapfill of semiconductor structure using doped silicate glasses | Markus Kirchhoff | 2000-04-11 |
| 6027968 | Advanced damascene planar stack capacitor fabrication method | Son V. Nguyen, Kevin J. Uram | 2000-02-22 |
| 5963837 | Method of planarizing the semiconductor structure | Dirk Tobben, Peter Weigand | 1999-10-05 |
| 5935873 | Deposition of carbon into nitride layer for improved selectivity of oxide to nitride etchrate for self aligned contact etching | Bruno Spuler, Juergen Wittmann, Martin Gutsche, Wolfgang Bergner | 1999-08-10 |
| 5928959 | Dishing resistance | Kai Huckels | 1999-07-27 |
| 5807792 | Uniform distribution of reactants in a device layer | Markus Kirchhoff, Christoph Werner | 1998-09-15 |
| 5770469 | Method for forming semiconductor structure using modulation doped silicate glasses | Kevin J. Uram, John Kevin Shugrue, Nathan Sandler, Son V. Nguyen | 1998-06-23 |
| 5753948 | Advanced damascene planar stack capacitor fabrication method | Son V. Nguyen, Kevin J. Uram | 1998-05-19 |