Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6544856 | Method for increasing the trench capacitance | Klaus-Dieter Morhard, Irene Sperl | 2003-04-08 |
| 6245640 | Method for fabricating a semiconductor structure | Wilhelm Claussen, Barbara Lorenz, Mirko Vogt, Hans-Peter Sperlich | 2001-06-12 |
| 6190955 | Fabrication of trench capacitors using disposable hard mask | Matthias Ilg, Richard L. Kleinhenz, Soichi Nadahara, Ronald W. Nunes, Klaus Roithner +2 more | 2001-02-20 |
| 5956142 | Method of end point detection using a sinusoidal interference signal for a wet etch process | K. Paul Muller | 1999-09-21 |
| 5800626 | Control of gas content in process liquids for improved megasonic cleaning of semiconductor wafers and microelectronics substrates | Susan L. Cohen, Emmanuel I. Cooper, David L. Rath, Kamalesh K. Srivastava | 1998-09-01 |
| 5683945 | Uniform trench fill recess by means of isotropic etching | Hans-Joerg Timme | 1997-11-04 |