| 6984556 |
Method of forming an isolation layer and method of manufacturing a trench capacitor |
Christian Drabe, Jana Haensel, Anke Krasemann, Barbara Lorenz, Thomas Morgenstern +1 more |
2006-01-10 |
| 6784553 |
Semiconductor device with self-aligned contact and method for manufacturing the device |
Ralf Zedlitz |
2004-08-31 |
| 6593254 |
Method for clamping a semiconductor device in a manufacturing process |
Manfred Kraxenberger, Ines Thümmel, Thorsten Schedel, Karl Mautz |
2003-07-15 |
| 6521542 |
Method for forming dual damascene structure |
Mike Armacost, Gabriela Brase, Alois Gutmann |
2003-02-18 |
| 6379869 |
Method of improving the etch resistance of chemically amplified photoresists by introducing silicon after patterning |
Uwe Schroeder, Gerhard Kunkel, Alois Gutmann |
2002-04-30 |
| 6177353 |
Metallization etching techniques for reducing post-etch corrosion of metal lines |
Martin Gutsche, Peter Strobl, Stephan Wege, Eike Lueken, Georg Stojakovic |
2001-01-23 |
| 6071820 |
Method for patterning integrated circuit conductors |
Virinder Grewal |
2000-06-06 |
| 6033984 |
Dual damascene with bond pads |
Rainer Florian Schnabel, Xian J. Ning |
2000-03-07 |
| 5976986 |
Low pressure and low power C1.sub.2 /HC1 process for sub-micron metal etching |
Munir D. Naeem, Stuart M. Burns, Rosemary Christie, Virinder Grewal, Walter W. Kocon +2 more |
1999-11-02 |
| 5935873 |
Deposition of carbon into nitride layer for improved selectivity of oxide to nitride etchrate for self aligned contact etching |
Juergen Wittmann, Martin Gutsche, Wolfgang Bergner, Matthias Ilg |
1999-08-10 |
| 5874363 |
Polycide etching with HCL and chlorine |
Peter D. Hoh, Tokuhisa Ohiwa, Virinder Grewal, Waldemar Walter Kocon, Guadalupe Wiltshire |
1999-02-23 |
| 5854126 |
Method for forming metallization in semiconductor devices with a self-planarizing material |
Dirk Tobben, Martin Gutsche, Peter Weigand |
1998-12-29 |
| 5846884 |
Methods for metal etching with reduced sidewall build up during integrated circuit manufacturing |
Munir D. Naeem, Stuart M. Burns, Nancy Anne Greco, STEVE GRECO, Virinder Grewal +2 more |
1998-12-08 |
