Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12151935 | Micromechanical structure, micromechanical system and method of providing a micromechanical structure | André Dreyhaupt | 2024-11-26 |
| 12071338 | Micromechanical structure and method of providing the same | Bert KAISER | 2024-08-27 |
| 9620375 | Production method | Sergiu LANGA, Thilo Sandner | 2017-04-11 |
| 8511657 | Torsion spring for micromechanical applications | Thomas Klose | 2013-08-20 |
| 8357944 | Semiconductor substrate and methods for the production thereof | Alexander Wolter, Roger Steadman, Andreas Bergmann, Gereon Vogtmeier, Ralf Dorscheid | 2013-01-22 |
| 8199390 | Method for structuring a device layer of a substrate | Thomas Klose | 2012-06-12 |
| 7940439 | Method for generating a micromechanical structure | Denis Jung, Thilo Sandner, Harald Schenk, Thomas Klose, Alexander Wolter | 2011-05-10 |
| 7932788 | Oscillating, deflectable micromechanical element and method for use thereof | Harald Schenk, Alexander Wolter, Thilo Sandner, Thomas Klose | 2011-04-26 |
| 7872319 | Deflectable structure, micromechanical structure comprising same, and method for adjusting a micromechanical structure | — | 2011-01-18 |
| 7466474 | Micromechanical device with tilted electrodes | Denis Jung, Harald Schenk, Thilo Sandner, Thomas Klose | 2008-12-16 |
| 7301690 | Micro-optical arrangement | Harald Schenk | 2007-11-27 |
| 7059189 | Acceleration sensor and method for detecting an acceleration | Harald Schenk | 2006-06-13 |
| 6984556 | Method of forming an isolation layer and method of manufacturing a trench capacitor | Jana Haensel, Anke Krasemann, Barbara Lorenz, Thomas Morgenstern, Torsten Schneider +1 more | 2006-01-10 |