Issued Patents All Time
Showing 1–25 of 32 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11639718 | Micromechanical devices with mechanical actuators | Holger Conrad, Matthieu Gaudet, Sebastian Uhlig | 2023-05-02 |
| 11554950 | MEMS transducer for interacting with a volume flow of a fluid, and method of producing same | Holger Conrad | 2023-01-17 |
| 10591651 | Micro-optical electromagnetic radiation diffraction grating and method for manufacture | Fabian Zimmer, Alexander Wolter | 2020-03-17 |
| 10483876 | Electrostatically deflectable micromechanical device | Sergiu LANGA, Holger Conrad, Michael Robert Stolz | 2019-11-19 |
| 10457544 | MEMS transducer for interacting with a volume flow of a fluid and method for manufacturing the same | Holger Conrad, Matthieu Gaudet, Klaus Schimmanz, Sergiu LANGA, Bert KAISER | 2019-10-29 |
| 10365244 | Ion-sensitive structure and method for producing the same | Eberhard Kurth, Christian Kunath | 2019-07-30 |
| 9893491 | Microelectromechanical system for tuning lasers | Jan Grahmann, Joachim Wagner, Ralf Ostendorf, Marcel Rattunde | 2018-02-13 |
| 9250367 | Fluidic variable focal length optical lens and method for manufacturing the same | Florenta Costache, Kirstin Bornhorst, Christian Schirrmann | 2016-02-02 |
| 9164277 | Micromechanical device | Holger Conrad, Christian Schirrmann, Thilo Sandner, Fabian Zimmer, Jan-Uwe Schmidt | 2015-10-20 |
| 9046704 | Apparatus and method for guiding optical waves | Florenta Costache, Martin Blasl | 2015-06-02 |
| 8842356 | Micromechanical device with temperature stabilization and method for adjusting a defined temperature or a defined temperature course on a micromechanical device | Thilo Sandner, Joerg Heber, Thomas Klose, Andreas Bergmann, Christian Gerwig +1 more | 2014-09-23 |
| 8752882 | Motor vehicle body with plasma-treated gluing surface | Klaus-Albert PRIESS, Michael Alhof, Robert N. Mann, Sharon Orlans | 2014-06-17 |
| 7977897 | Apparatus and method for controlling or regulating an oscillating deflectable micromechanical element | — | 2011-07-12 |
| 7951635 | Method for the compensation of deviations occurring as a result of manufacture in the manufacture of micromechanical elements and their use | Thomas Klose, Alexander Wolter | 2011-05-31 |
| 7940439 | Method for generating a micromechanical structure | Denis Jung, Christian Drabe, Thilo Sandner, Thomas Klose, Alexander Wolter | 2011-05-10 |
| 7932788 | Oscillating, deflectable micromechanical element and method for use thereof | Alexander Wolter, Thilo Sandner, Christian Drabe, Thomas Klose | 2011-04-26 |
| 7847997 | Projection apparatus for scanningly projection | Thilo Sandner, Michael Scholles, Markus Schwarzenberg, Alexander Wolter | 2010-12-07 |
| 7760414 | Optical device comprising a structure for avoiding reflections | Thilo Sandner | 2010-07-20 |
| 7573634 | Micromechanical mirrors with a high-reflection coating, method for production thereof and use thereof | Uwe Schmidt, Thilo Sandner, Alexandre Gatto, Minghong Yang, Jörg Heber +1 more | 2009-08-11 |
| 7518770 | Apparatus and method for projecting images and/or processing materials | — | 2009-04-14 |
| 7490947 | Microoptic reflecting component | Thilo Sandner, Wolfram Pufe | 2009-02-17 |
| 7466474 | Micromechanical device with tilted electrodes | Denis Jung, Christian Drabe, Thilo Sandner, Thomas Klose | 2008-12-16 |
| 7301690 | Micro-optical arrangement | Christian Drabe | 2007-11-27 |
| 7301643 | Arrangement for building a miniaturized fourier transform interferometer for optical radiation according to the michelson principle or a principle derived therefrom | Andreas Kenda, Werner Scherf, Marin Kraft | 2007-11-27 |
| 7078778 | Micromechanical device | — | 2006-07-18 |