Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9620375 | Production method | Sergiu LANGA, Christian Drabe | 2017-04-11 |
| 9164277 | Micromechanical device | Holger Conrad, Harald Schenk, Christian Schirrmann, Fabian Zimmer, Jan-Uwe Schmidt | 2015-10-20 |
| 8873128 | Reduction of the dynamic deformation of translational mirrors using inertial masses | Holger Conrad, Thomas Grasshoff, Denis Jung | 2014-10-28 |
| 8842356 | Micromechanical device with temperature stabilization and method for adjusting a defined temperature or a defined temperature course on a micromechanical device | Harald Schenk, Joerg Heber, Thomas Klose, Andreas Bergmann, Christian Gerwig +1 more | 2014-09-23 |
| 8147136 | Micromechanical device with temperature stabilization and method for adjusting a defined temperature or a defined temperature course on a micromechanical device | Jörg Heber, Thomas Klose, Andreas Bergmann, Christian Gerwig, Thomas Knieling | 2012-04-03 |
| 7940439 | Method for generating a micromechanical structure | Denis Jung, Christian Drabe, Harald Schenk, Thomas Klose, Alexander Wolter | 2011-05-10 |
| 7932788 | Oscillating, deflectable micromechanical element and method for use thereof | Harald Schenk, Alexander Wolter, Christian Drabe, Thomas Klose | 2011-04-26 |
| 7929192 | Method of fabricating a micromechanical structure out of two-dimensional elements and micromechanical device | — | 2011-04-19 |
| 7898071 | Apparatus and method for housing micromechanical systems | Thor Bakke | 2011-03-01 |
| 7847997 | Projection apparatus for scanningly projection | Harald Schenk, Michael Scholles, Markus Schwarzenberg, Alexander Wolter | 2010-12-07 |
| 7841242 | Deflectable micromechanical system and use thereof | Holger Conrad, Thomas Klose | 2010-11-30 |
| 7830577 | Micromechanical device with adjustable resonant frequency by geometry alteration and method for operating same | Thomas Grasshoff, Thomas Klose | 2010-11-09 |
| 7760414 | Optical device comprising a structure for avoiding reflections | Harald Schenk | 2010-07-20 |
| 7573634 | Micromechanical mirrors with a high-reflection coating, method for production thereof and use thereof | Uwe Schmidt, Harald Schenk, Alexandre Gatto, Minghong Yang, Jörg Heber +1 more | 2009-08-11 |
| 7490947 | Microoptic reflecting component | Wolfram Pufe, Harald Schenk | 2009-02-17 |
| 7466474 | Micromechanical device with tilted electrodes | Denis Jung, Christian Drabe, Harald Schenk, Thomas Klose | 2008-12-16 |