Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8873128 | Reduction of the dynamic deformation of translational mirrors using inertial masses | Holger Conrad, Thomas Grasshoff, Thilo Sandner | 2014-10-28 |
| 8570637 | Micromechanical element | Holger Conrad | 2013-10-29 |
| 7940439 | Method for generating a micromechanical structure | Christian Drabe, Thilo Sandner, Harald Schenk, Thomas Klose, Alexander Wolter | 2011-05-10 |
| 7466474 | Micromechanical device with tilted electrodes | Christian Drabe, Harald Schenk, Thilo Sandner, Thomas Klose | 2008-12-16 |