Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10591651 | Micro-optical electromagnetic radiation diffraction grating and method for manufacture | Fabian Zimmer, Harald Schenk | 2020-03-17 |
| 9045329 | Micromechanical element which can be deflected | Thomas Klose | 2015-06-02 |
| 8357944 | Semiconductor substrate and methods for the production thereof | Christian Drabe, Roger Steadman, Andreas Bergmann, Gereon Vogtmeier, Ralf Dorscheid | 2013-01-22 |
| 7951635 | Method for the compensation of deviations occurring as a result of manufacture in the manufacture of micromechanical elements and their use | Thomas Klose, Harald Schenk | 2011-05-31 |
| 7940439 | Method for generating a micromechanical structure | Denis Jung, Christian Drabe, Thilo Sandner, Harald Schenk, Thomas Klose | 2011-05-10 |
| 7932788 | Oscillating, deflectable micromechanical element and method for use thereof | Harald Schenk, Thilo Sandner, Christian Drabe, Thomas Klose | 2011-04-26 |
| 7847997 | Projection apparatus for scanningly projection | Thilo Sandner, Harald Schenk, Michael Scholles, Markus Schwarzenberg | 2010-12-07 |
| 7469834 | Scanner and method for operating a scanner | Uwe Schelinski, Michael Scholles | 2008-12-30 |
| 7369288 | Micromechanical optical element having a reflective surface as well as its use | Thomas Klose | 2008-05-06 |
| 6843568 | Projection apparatus | Harald Schenk, Markus Schwarzenberg | 2005-01-18 |