Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11454803 | Micromechanical mirror device | — | 2022-09-27 |
| 8873128 | Reduction of the dynamic deformation of translational mirrors using inertial masses | Holger Conrad, Denis Jung, Thilo Sandner | 2014-10-28 |
| 8379283 | Micromechanical element and sensor for monitoring a micromechanical element | Thomas Klose, Holger Conrad | 2013-02-19 |
| 7830577 | Micromechanical device with adjustable resonant frequency by geometry alteration and method for operating same | Thomas Klose, Thilo Sandner | 2010-11-09 |