Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11186478 | MEMS and method of manufacturing the same | Holger Conrad, Klaus Schimmanz | 2021-11-30 |
| 10483876 | Electrostatically deflectable micromechanical device | Holger Conrad, Harald Schenk, Michael Robert Stolz | 2019-11-19 |
| 10457544 | MEMS transducer for interacting with a volume flow of a fluid and method for manufacturing the same | Harald Schenk, Holger Conrad, Matthieu Gaudet, Klaus Schimmanz, Bert KAISER | 2019-10-29 |
| 9676607 | Micromechanical device with an actively deflectable element | Matthieu Gaudet, Klaus Schimmanz, Michael Robert Stolz, Holger Conrad, Bert KAISER | 2017-06-13 |
| 9620375 | Production method | Christian Drabe, Thilo Sandner | 2017-04-11 |