Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11186478 | MEMS and method of manufacturing the same | Sergiu LANGA, Holger Conrad | 2021-11-30 |
| 10457544 | MEMS transducer for interacting with a volume flow of a fluid and method for manufacturing the same | Harald Schenk, Holger Conrad, Matthieu Gaudet, Sergiu LANGA, Bert KAISER | 2019-10-29 |
| 9676607 | Micromechanical device with an actively deflectable element | Matthieu Gaudet, Michael Robert Stolz, Sergiu LANGA, Holger Conrad, Bert KAISER | 2017-06-13 |