Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8842356 | Micromechanical device with temperature stabilization and method for adjusting a defined temperature or a defined temperature course on a micromechanical device | Thilo Sandner, Harald Schenk, Joerg Heber, Thomas Klose, Andreas Bergmann +1 more | 2014-09-23 |
| 8147136 | Micromechanical device with temperature stabilization and method for adjusting a defined temperature or a defined temperature course on a micromechanical device | Jörg Heber, Thomas Klose, Thilo Sandner, Andreas Bergmann, Christian Gerwig | 2012-04-03 |