Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6984556 | Method of forming an isolation layer and method of manufacturing a trench capacitor | Christian Drabe, Jana Haensel, Anke Krasemann, Barbara Lorenz, Torsten Schneider +1 more | 2006-01-10 |
| 6855596 | Method for manufacturing a trench capacitor having an isolation trench | Gabriele Fichtl, Jana Haensel, Thomas Metzdorf | 2005-02-15 |
| 6852639 | Etching processing method for a material layer | Matthias Rudolph, Jens Stolze, Jana Haensel | 2005-02-08 |
| 6593242 | Process for planarization and recess etching of integrated circuits | — | 2003-07-15 |