Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6852639 | Etching processing method for a material layer | Matthias Rudolph, Thomas Morgenstern, Jana Haensel | 2005-02-08 |
| 6449038 | Detecting a process endpoint from a change in reflectivity | — | 2002-09-10 |