Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5976986 | Low pressure and low power C1.sub.2 /HC1 process for sub-micron metal etching | Munir D. Naeem, Stuart M. Burns, Virinder Grewal, Walter W. Kocon, Masaki Narita +2 more | 1999-11-02 |
| 4630356 | Method of forming recessed oxide isolation with reduced steepness of the birds' neck | Bao-Tai Hwang, San-Mei Ku, Janet Sickler | 1986-12-23 |