Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5976986 | Low pressure and low power C1.sub.2 /HC1 process for sub-micron metal etching | Munir D. Naeem, Stuart M. Burns, Rosemary Christie, Virinder Grewal, Masaki Narita +2 more | 1999-11-02 |