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2017-09-12 |
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Integrated circuits and manufacturing methods |
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2002-12-10 |
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Semiconductor workpiece processing apparatus and method |
Naohiro Shoda |
2002-06-18 |
| 6252292 |
Vertical electrical cavity-fuse |
Axel Brintzinger, Roy Iggulden, Stefan Weber |
2001-06-26 |
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Method of manufacturing a shallow trench isolation structure for a semiconductor device |
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2000-11-21 |
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Metal line deposition process |
Sven Schmidbauer, Stefan Weber, Larry Clevenger, Roy Iggulden |
2000-10-24 |
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Metalization system having an enhanced thermal conductivity |
Dirk Tobben |
2000-04-04 |
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Microstructure and methods for fabricating such structure |
Dirk Tobben |
2000-01-18 |
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Semiconductor wafer temperature measurement and control thereof using gas temperature measurement |
Naohiro Shoda |
1999-11-30 |
| 5977635 |
Multi-level conductive structure including low capacitance material |
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1999-11-02 |
| 5963837 |
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Matthias Ilg, Dirk Tobben |
1999-10-05 |
| 5937541 |
Semiconductor wafer temperature measurement and control thereof using gas temperature measurement |
Naohiro Shoda |
1999-08-17 |
| 5926716 |
Method for forming a structure |
Dirk Tobben |
1999-07-20 |
| 5899736 |
Techniques for forming electrically blowable fuses on an integrated circuit |
Dirk Tobben |
1999-05-04 |
| 5854126 |
Method for forming metallization in semiconductor devices with a self-planarizing material |
Dirk Tobben, Bruno Spuler, Martin Gutsche |
1998-12-29 |
| 5851899 |
Gapfill and planarization process for shallow trench isolation |
— |
1998-12-22 |
| 5415256 |
Friction type torque-limiting clutch brake which splits into halves for easy replacement |
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1995-05-16 |
| 4952108 |
Apparatus for automatically feeding a sequence of crucibles to a test oven |
Harald Langen, Hans Joachim KUPKA, Gerhard Rossel, Walter Weigand, Rudiger Wittenbeck +1 more |
1990-08-28 |
