Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9355886 | Conformal film deposition for gapfill | Shankar Swaminathan, Bart J. van Schravendijk, Adrien LaVoie, Sesha Varadarajan, Jason D. Park +1 more | 2016-05-31 |
| 8728958 | Gap fill integration | Kaihan Ashtiani, Michael Wood, John Drewery, Bart van Schravendijk, Lakshminarayana Nittala +1 more | 2014-05-20 |
| 6406545 | Semiconductor workpiece processing apparatus and method | Peter Weigand | 2002-06-18 |
| 6150072 | Method of manufacturing a shallow trench isolation structure for a semiconductor device | Peter Weigand | 2000-11-21 |
| 5992046 | Semiconductor wafer temperature measurement and control thereof using gas temperature measurement | Peter Weigand | 1999-11-30 |
| 5950099 | Method of forming an interconnect | Katsuya Okumura | 1999-09-07 |
| 5937541 | Semiconductor wafer temperature measurement and control thereof using gas temperature measurement | Peter Weigand | 1999-08-17 |
| 5689140 | Method for forming studs and interconnects in a multi-layered semiconductor device | — | 1997-11-18 |
| 5652040 | Magnetic recording medium | Takashi Yamada | 1997-07-29 |
| 5529953 | Method of forming studs and interconnects in a multi-layered semiconductor device | — | 1996-06-25 |
| 5458947 | Magnetic recording medium | Takashi Yamada | 1995-10-17 |