| 6797582 |
Vertical thermal nitride mask (anti-collar) and processing thereof |
Oleg Gluschenkov, Michael P. Chudzik, Rajarao Jammy, Christopher C. Parks, Kenneth T. Settlemyer, Jr. +1 more |
2004-09-28 |
| 6348394 |
Method and device for array threshold voltage control by trapped charge in trench isolation |
Jack A. Mandelman, Rama Divakaruni, Herbert L. Ho, Giuseppe La Rosa, Yujun Li +1 more |
2002-02-19 |
| 6333531 |
Dopant control of semiconductor devices |
Yun-Yu Wang, Johnathan E. Faltermeier, Philip L. Flaitz, Jeffery L. Hurd, Rajarao Jammy +2 more |
2001-12-25 |
| 6190955 |
Fabrication of trench capacitors using disposable hard mask |
Matthias Ilg, Richard L. Kleinhenz, Soichi Nadahara, Ronald W. Nunes, Klaus Penner +2 more |
2001-02-20 |
| 6153474 |
Method of controllably forming a LOCOS oxide layer over a portion of a vertically extending sidewall of a trench extending into a semiconductor substrate |
Herbert L. Ho, Scott D. Halle, Erwin Hammerl, David M. Dobuzinsky, Jack A. Mandelman +1 more |
2000-11-28 |
| 6140208 |
Shallow trench isolation (STI) with bilayer of oxide-nitride for VLSI applications |
Farid Agahi, Gary B. Bronner, Bertrand Flietner, Erwin Hammerl, Herbert L. Ho |
2000-10-31 |
| 6130145 |
Insitu doped metal policide |
Matthias Ilg, Johnathan E. Faltermeier |
2000-10-10 |
| 6074903 |
Method for forming electrical isolation for semiconductor devices |
Rajesh Rengarajan, Hirofumi Inoue, Jochen Beintner |
2000-06-13 |
| 5923971 |
Reliable low resistance strap for trench storage DRAM cell using selective epitaxy |
Herbert L. Ho, Andre R. LeBlanc, Jack A. Mandelman |
1999-07-13 |
| 5893735 |
Three-dimensional device layout with sub-groundrule features |
Reinhard Stengl, Erwin Hammerl, Jack A. Mandelman, Herbert L. Ho, Alvin P. Short +1 more |
1999-04-13 |
| 5844266 |
Buried strap formation in a DRAM trench capacitor |
Reinhard Stengl, Erwin Hammerl, Herbert L. Ho, Jack A. Mandelman, Alvin P. Short |
1998-12-01 |
| 5827765 |
Buried-strap formation in a dram trench capacitor |
Reinhard Stengl, Erwin Hammerl, Herbert L. Ho, Jack A. Mandelman, Alvin P. Short |
1998-10-27 |
| 5792685 |
Three-dimensional device layout having a trench capacitor |
Erwin Hammerl, Jack A. Mandelman, Bernhard Poschenrieder, Alvin P. Short, Reinhard Stengl +1 more |
1998-08-11 |
| 5656535 |
Storage node process for deep trench-based DRAM |
Herbert L. Ho, Scott D. Halle, Erwin Hammerl, David M. Dobuzinsky, Jack A. Mandelman +1 more |
1997-08-12 |
