Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6699794 | Self aligned buried plate | Wolfgang Bergner | 2004-03-02 |
| 6537418 | Spatially uniform gas supply and pump configuration for large wafer diameters | K. Paul Muller, Klaus Roithner | 2003-03-25 |
| 6140208 | Shallow trench isolation (STI) with bilayer of oxide-nitride for VLSI applications | Farid Agahi, Gary B. Bronner, Erwin Hammerl, Herbert L. Ho, Radhika Srinivasan | 2000-10-31 |
| 6140833 | In-situ measurement method and apparatus for semiconductor processing | K. Paul Muller | 2000-10-31 |
| 6124206 | Reduced pad erosion | Robert Ploessl, Monika Gschoederer | 2000-09-26 |
| 6103585 | Method of forming deep trench capacitors | Alexander Michaelis, Rajiv Ranade | 2000-08-15 |
| 5786235 | Process for depositing a surface-wide layer through a mask and optionally closing said mask | Ignaz Eisele, Josef Lechner | 1998-07-28 |